MEMS Micromachining Overview - scme-support.org This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems).  Activities are provided that contribution to a better understanding of these processes and that encourage further exploration.

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]]> https://www.scme-support.org/index.php/educational-materials/introductory-topics/mems-fabrication/mems-micromachining-overview?format=html Mon, 26 Jun 2017 18:24:27 +0000 en-GB hourly 1 MEMS Micromachining Presentation https://www.scme-support.org/index.php/educational-materials/introductory-topics/mems-fabrication/mems-micromachining-overview/mems-micromachining-overview-presentations/495-mems-micromachining-presentation?format=html MEMS Micromachining Presentation https://www.scme-support.org/index.php/educational-materials/introductory-topics/mems-fabrication/mems-micromachining-overview/mems-micromachining-overview-presentations/495-mems-micromachining-presentation?format=html botero@unm.edu (Barbara C. Lopez) MEMS Micromachining Overview Presentations Mon, 26 Jun 2017 18:24:27 +0000 Micromachining PG - Lesson https://www.scme-support.org/index.php/educational-materials/introductory-topics/mems-fabrication/mems-micromachining-overview/mems-micromachining-overview-for-participants/mems-micromachining-overview-participant-guides-pdfs/494-micromachining-pg-lesson-1?format=html Micromachining PG - Lesson https://www.scme-support.org/index.php/educational-materials/introductory-topics/mems-fabrication/mems-micromachining-overview/mems-micromachining-overview-for-participants/mems-micromachining-overview-participant-guides-pdfs/494-micromachining-pg-lesson-1?format=html botero@unm.edu (Barbara C. Lopez) MEMS Micromachining Overview Participant Guides - pdfs Mon, 26 Jun 2017 18:23:35 +0000 Micromachining PG - Knowledge Probe https://www.scme-support.org/index.php/educational-materials/introductory-topics/mems-fabrication/mems-micromachining-overview/mems-micromachining-overview-for-participants/mems-micromachining-overview-participant-guides-pdfs/493-micromachining-pg-knowledge-probe-1?format=html Micromachining PG - Knowledge Probe https://www.scme-support.org/index.php/educational-materials/introductory-topics/mems-fabrication/mems-micromachining-overview/mems-micromachining-overview-for-participants/mems-micromachining-overview-participant-guides-pdfs/493-micromachining-pg-knowledge-probe-1?format=html botero@unm.edu (Barbara C. Lopez) MEMS Micromachining Overview Participant Guides - pdfs Mon, 26 Jun 2017 18:23:33 +0000 Micromachining PG - Final Assessment https://www.scme-support.org/index.php/educational-materials/introductory-topics/mems-fabrication/mems-micromachining-overview/mems-micromachining-overview-for-participants/mems-micromachining-overview-participant-guides-pdfs/492-micromachining-pg-final-assessment-1?format=html Micromachining PG - Final Assessment https://www.scme-support.org/index.php/educational-materials/introductory-topics/mems-fabrication/mems-micromachining-overview/mems-micromachining-overview-for-participants/mems-micromachining-overview-participant-guides-pdfs/492-micromachining-pg-final-assessment-1?format=html botero@unm.edu (Barbara C. Lopez) MEMS Micromachining Overview Participant Guides - pdfs Mon, 26 Jun 2017 18:23:31 +0000 Micromachining PG - Research Activity https://www.scme-support.org/index.php/educational-materials/introductory-topics/mems-fabrication/mems-micromachining-overview/mems-micromachining-overview-for-participants/mems-micromachining-overview-participant-guides-pdfs/491-micromachining-pg-research-activity-1?format=html Micromachining PG - Research Activity https://www.scme-support.org/index.php/educational-materials/introductory-topics/mems-fabrication/mems-micromachining-overview/mems-micromachining-overview-for-participants/mems-micromachining-overview-participant-guides-pdfs/491-micromachining-pg-research-activity-1?format=html botero@unm.edu (Barbara C. Lopez) MEMS Micromachining Overview Participant Guides - pdfs Mon, 26 Jun 2017 18:23:29 +0000 Micromachining PG - Terminology Activity https://www.scme-support.org/index.php/educational-materials/introductory-topics/mems-fabrication/mems-micromachining-overview/mems-micromachining-overview-for-participants/mems-micromachining-overview-participant-guides-pdfs/490-micromachining-pg-terminology-activity-1?format=html Micromachining PG - Terminology Activity https://www.scme-support.org/index.php/educational-materials/introductory-topics/mems-fabrication/mems-micromachining-overview/mems-micromachining-overview-for-participants/mems-micromachining-overview-participant-guides-pdfs/490-micromachining-pg-terminology-activity-1?format=html botero@unm.edu (Barbara C. Lopez) MEMS Micromachining Overview Participant Guides - pdfs Mon, 26 Jun 2017 18:23:27 +0000 Micromachining PG - Lesson https://www.scme-support.org/index.php/educational-materials/introductory-topics/mems-fabrication/mems-micromachining-overview/mems-micromachining-overview-for-participants/mems-micromachining-overview-participant-guides-docs/489-micromachining-pg-lesson?format=html Micromachining PG - Lesson https://www.scme-support.org/index.php/educational-materials/introductory-topics/mems-fabrication/mems-micromachining-overview/mems-micromachining-overview-for-participants/mems-micromachining-overview-participant-guides-docs/489-micromachining-pg-lesson?format=html botero@unm.edu (Barbara C. Lopez) MEMS Micromachining Overview Participant Guides - docs Mon, 26 Jun 2017 18:22:06 +0000 Micromachining PG - Knowledge Probe https://www.scme-support.org/index.php/educational-materials/introductory-topics/mems-fabrication/mems-micromachining-overview/mems-micromachining-overview-for-participants/mems-micromachining-overview-participant-guides-docs/488-micromachining-pg-knowledge-probe?format=html Micromachining PG - Knowledge Probe https://www.scme-support.org/index.php/educational-materials/introductory-topics/mems-fabrication/mems-micromachining-overview/mems-micromachining-overview-for-participants/mems-micromachining-overview-participant-guides-docs/488-micromachining-pg-knowledge-probe?format=html botero@unm.edu (Barbara C. Lopez) MEMS Micromachining Overview Participant Guides - docs Mon, 26 Jun 2017 18:22:03 +0000 Micromachining PG - Final Assessment https://www.scme-support.org/index.php/educational-materials/introductory-topics/mems-fabrication/mems-micromachining-overview/mems-micromachining-overview-for-participants/mems-micromachining-overview-participant-guides-docs/487-micromachining-pg-final-assessment?format=html Micromachining PG - Final Assessment https://www.scme-support.org/index.php/educational-materials/introductory-topics/mems-fabrication/mems-micromachining-overview/mems-micromachining-overview-for-participants/mems-micromachining-overview-participant-guides-docs/487-micromachining-pg-final-assessment?format=html botero@unm.edu (Barbara C. Lopez) MEMS Micromachining Overview Participant Guides - docs Mon, 26 Jun 2017 18:22:01 +0000 Micromachining PG - Research Activity https://www.scme-support.org/index.php/educational-materials/introductory-topics/mems-fabrication/mems-micromachining-overview/mems-micromachining-overview-for-participants/mems-micromachining-overview-participant-guides-docs/486-micromachining-pg-research-activity?format=html Micromachining PG - Research Activity https://www.scme-support.org/index.php/educational-materials/introductory-topics/mems-fabrication/mems-micromachining-overview/mems-micromachining-overview-for-participants/mems-micromachining-overview-participant-guides-docs/486-micromachining-pg-research-activity?format=html botero@unm.edu (Barbara C. Lopez) MEMS Micromachining Overview Participant Guides - docs Mon, 26 Jun 2017 18:21:58 +0000 Micromachining PG - Terminology Activity https://www.scme-support.org/index.php/educational-materials/introductory-topics/mems-fabrication/mems-micromachining-overview/mems-micromachining-overview-for-participants/mems-micromachining-overview-participant-guides-docs/485-micromachining-pg-terminology-activity?format=html Micromachining PG - Terminology Activity https://www.scme-support.org/index.php/educational-materials/introductory-topics/mems-fabrication/mems-micromachining-overview/mems-micromachining-overview-for-participants/mems-micromachining-overview-participant-guides-docs/485-micromachining-pg-terminology-activity?format=html botero@unm.edu (Barbara C. Lopez) MEMS Micromachining Overview Participant Guides - docs Mon, 26 Jun 2017 18:21:56 +0000