Documents - scme-support.org This learning module provides an overview of the most common photolithography process used for the fabrication of microelectromechanical systems (MEMS), its terminology and basic concepts.  Activities allow you to further explore some of these concepts.

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]]> https://www.scme-support.org/index.php/educational-materials/category-02/photolithography-overview-for-microsystems?format=html Fri, 09 Jun 2017 17:27:52 +0000 en-GB hourly 1 Photolithography Presentation https://www.scme-support.org/index.php/educational-materials/category-02/photolithography-overview-for-microsystems/photolithography-overview-presentations/449-photolithography-presentation?format=html Photolithography Presentation https://www.scme-support.org/index.php/educational-materials/category-02/photolithography-overview-for-microsystems/photolithography-overview-presentations/449-photolithography-presentation?format=html botero@unm.edu (Barbara C. Lopez) Photolithography Overview Presentations Fri, 09 Jun 2017 17:27:52 +0000 Photolithography Overview PG - Lesson https://www.scme-support.org/index.php/educational-materials/category-02/photolithography-overview-for-microsystems/photolithography-overview-for-participants/photolithography-overview-participant-guides-pdfs/448-photolithography-overview-pg-lesson-1?format=html Photolithography Overview PG - Lesson https://www.scme-support.org/index.php/educational-materials/category-02/photolithography-overview-for-microsystems/photolithography-overview-for-participants/photolithography-overview-participant-guides-pdfs/448-photolithography-overview-pg-lesson-1?format=html botero@unm.edu (Barbara C. Lopez) Photolithography Overview Participant Guides - pdfs Fri, 09 Jun 2017 17:27:17 +0000 Photolithography Overview PG - Knowledge Probe https://www.scme-support.org/index.php/educational-materials/category-02/photolithography-overview-for-microsystems/photolithography-overview-for-participants/photolithography-overview-participant-guides-pdfs/447-photolithography-overview-pg-knowledge-probe-1?format=html Photolithography Overview PG - Knowledge Probe https://www.scme-support.org/index.php/educational-materials/category-02/photolithography-overview-for-microsystems/photolithography-overview-for-participants/photolithography-overview-participant-guides-pdfs/447-photolithography-overview-pg-knowledge-probe-1?format=html botero@unm.edu (Barbara C. Lopez) Photolithography Overview Participant Guides - pdfs Fri, 09 Jun 2017 17:27:15 +0000 Photolithography Overview PG - Final Assessment https://www.scme-support.org/index.php/educational-materials/category-02/photolithography-overview-for-microsystems/photolithography-overview-for-participants/photolithography-overview-participant-guides-pdfs/446-photolithography-overview-pg-final-assessment-1?format=html Photolithography Overview PG - Final Assessment https://www.scme-support.org/index.php/educational-materials/category-02/photolithography-overview-for-microsystems/photolithography-overview-for-participants/photolithography-overview-participant-guides-pdfs/446-photolithography-overview-pg-final-assessment-1?format=html botero@unm.edu (Barbara C. Lopez) Photolithography Overview Participant Guides - pdfs Fri, 09 Jun 2017 17:27:14 +0000 Photolithography Overview PG - Photoresist Thickness Activity https://www.scme-support.org/index.php/educational-materials/category-02/photolithography-overview-for-microsystems/photolithography-overview-for-participants/photolithography-overview-participant-guides-pdfs/445-photolithography-overview-pg-photoresist-thickness-activity-1?format=html Photolithography Overview PG - Photoresist Thickness Activity https://www.scme-support.org/index.php/educational-materials/category-02/photolithography-overview-for-microsystems/photolithography-overview-for-participants/photolithography-overview-participant-guides-pdfs/445-photolithography-overview-pg-photoresist-thickness-activity-1?format=html botero@unm.edu (Barbara C. Lopez) Photolithography Overview Participant Guides - pdfs Fri, 09 Jun 2017 17:27:12 +0000 Photolithography Overview PG - Terminology Activity https://www.scme-support.org/index.php/educational-materials/category-02/photolithography-overview-for-microsystems/photolithography-overview-for-participants/photolithography-overview-participant-guides-pdfs/444-photolithography-overview-pg-terminology-activity-1?format=html Photolithography Overview PG - Terminology Activity https://www.scme-support.org/index.php/educational-materials/category-02/photolithography-overview-for-microsystems/photolithography-overview-for-participants/photolithography-overview-participant-guides-pdfs/444-photolithography-overview-pg-terminology-activity-1?format=html botero@unm.edu (Barbara C. Lopez) Photolithography Overview Participant Guides - pdfs Fri, 09 Jun 2017 17:27:10 +0000 Photolithography Overview PG - Lesson https://www.scme-support.org/index.php/educational-materials/category-02/photolithography-overview-for-microsystems/photolithography-overview-for-participants/photolithography-overview-participant-guides-docs/443-photolithography-overview-pg-lesson?format=html Photolithography Overview PG - Lesson https://www.scme-support.org/index.php/educational-materials/category-02/photolithography-overview-for-microsystems/photolithography-overview-for-participants/photolithography-overview-participant-guides-docs/443-photolithography-overview-pg-lesson?format=html botero@unm.edu (Barbara C. Lopez) Photolithography Overview Participant Guides - docs Fri, 09 Jun 2017 17:26:01 +0000 Photolithography Overview PG - Knowledge Probe https://www.scme-support.org/index.php/educational-materials/category-02/photolithography-overview-for-microsystems/photolithography-overview-for-participants/photolithography-overview-participant-guides-docs/442-photolithography-overview-pg-knowledge-probe?format=html Photolithography Overview PG - Knowledge Probe https://www.scme-support.org/index.php/educational-materials/category-02/photolithography-overview-for-microsystems/photolithography-overview-for-participants/photolithography-overview-participant-guides-docs/442-photolithography-overview-pg-knowledge-probe?format=html botero@unm.edu (Barbara C. Lopez) Photolithography Overview Participant Guides - docs Fri, 09 Jun 2017 17:25:59 +0000 Photolithography Overview PG - Final Assessment https://www.scme-support.org/index.php/educational-materials/category-02/photolithography-overview-for-microsystems/photolithography-overview-for-participants/photolithography-overview-participant-guides-docs/441-photolithography-overview-pg-final-assessment?format=html Photolithography Overview PG - Final Assessment https://www.scme-support.org/index.php/educational-materials/category-02/photolithography-overview-for-microsystems/photolithography-overview-for-participants/photolithography-overview-participant-guides-docs/441-photolithography-overview-pg-final-assessment?format=html botero@unm.edu (Barbara C. Lopez) Photolithography Overview Participant Guides - docs Fri, 09 Jun 2017 17:25:58 +0000 Photolithography Overview PG - Photoresist Thickness Activity https://www.scme-support.org/index.php/educational-materials/category-02/photolithography-overview-for-microsystems/photolithography-overview-for-participants/photolithography-overview-participant-guides-docs/440-photolithography-overview-pg-photoresist-thickness-activity?format=html Photolithography Overview PG - Photoresist Thickness Activity https://www.scme-support.org/index.php/educational-materials/category-02/photolithography-overview-for-microsystems/photolithography-overview-for-participants/photolithography-overview-participant-guides-docs/440-photolithography-overview-pg-photoresist-thickness-activity?format=html botero@unm.edu (Barbara C. Lopez) Photolithography Overview Participant Guides - docs Fri, 09 Jun 2017 17:25:56 +0000 Photolithography Overview PG - Terminology Activity https://www.scme-support.org/index.php/educational-materials/category-02/photolithography-overview-for-microsystems/photolithography-overview-for-participants/photolithography-overview-participant-guides-docs/439-photolithography-overview-pg-terminology-activity?format=html Photolithography Overview PG - Terminology Activity https://www.scme-support.org/index.php/educational-materials/category-02/photolithography-overview-for-microsystems/photolithography-overview-for-participants/photolithography-overview-participant-guides-docs/439-photolithography-overview-pg-terminology-activity?format=html botero@unm.edu (Barbara C. Lopez) Photolithography Overview Participant Guides - docs Fri, 09 Jun 2017 17:25:55 +0000